NanoScan Lab with FIB/SEM and Large Sample SPM

Forschungszentrum Jülich - Helmholtz Nano Facility (HNF)

SEM FIB SPM STM

Reference Number: 184704

Extension to the large 14 modules HNF cluster by a NanoScan Lab for SEM/FIB and an SPM module. Both modules are interfaced to the existing cluster and work on 4" samples.

  • NanoScanLab 
  • LS SPM for scanning probe microscopy on 4" wafers
  • COBRA FIB
  • UHV Gemini SEM

Integrated Instruments