Triple EFM

Full Range of Electron Beam Evaporators for all Kind of Deposition

At a Glance

  • Evaporation area Ø 8.5, 11 and 15 mm
  • Working distance 93 mm (± 10 mm)
  • 3 independent cells/filaments/ flux monitors
  • No crosstalk during compound growth
  • Rear-loading of evaporants
  • A FOCUS product

Based on the design concept of the EFM 3 evaporators, the Triple EFM features three independent cells for the evaporation of a wide range of materials from wires, rods or crucibles. Each cell is equipped with a separate filament and HV supply to prevent crosstalk (300 W each). Three independent flux monitors enable the controlled stoichiometric growth of compounds. The integral multi-position shutter enables precise dosing and simultaneous or consecutive evaporation ('open' positions: 1, 2, 3, 1+3, 2+3, 1+2+3). The deposition area is governed by the choice of one of three apertures.

The three evaporation targets are indepen-dently mounted on three 25 mm Z-shifts for alignment with respect to the filament. This feature allows evaporation from rods with a multi-pocket instrument. The target materials can be easily refilled from the rear (3x NW 16 CF).