EKF 300

Electron Source

At a Glance

  • Versatile electron source
  • High beam current
  • Broad and small area AES

The EKF 300 Electron Source with the NGE 52 Electron Source Power Supply is a highly versatile 0.1 to 5 keV electron source designed for both static Auger measurements and for use as an electron flood source. The spot size can be adjusted down to 300 μm within an energy range from 1 keV to 5 keV at the standard working distance of 66 mm.