EBV40/100

High Purity e-beam Evaporator

  • Fully UHV compatible construction
  • DN150CF/ DN200CF/DN250CF (8"/10”/12” OD) mounting flange
  • Hearth volumes 40 cm3 or 100 cm3
  • Effective water cooling of the hearth 
  • Long filament lifetime 
  • Easy maintenance 
  • 270° beam deflection 
  • Standard 3 kW or 5 kW power (up to 10kW possible)
  • Acceleration voltage from 4 to 10 kV
  • High frequency x-y-beam deflection system 
  • Silicon shielding parts for use in SiGe-MBE


Options: 

  • water cooling hood with custom apertures integrated to the mounting flange
  • integrated linear source shutter with drive unit
  • integrated refill unit
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