EBV40/100

High Purity e-beam Evaporator

  • (Very) low vapor pressure materials
  • Metals, refractory metals (Mo, Nb, Ta, W, Zr)
  • High growth rate evaporation of Al
  • Dopants (e.g. boron or carbon)
  • High-k materials (Al2O3 or Pr3O3
  • Oxides 
  • Dielectrica
  • Ultra pure Si and Ge evaporation in SiGe MBE
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