Reference Systems

Installed around the world

Oak Ridge National Labs - Epitaxial Quantum Materials

Research focus on controlled synthesis of epitaxial thin films and nanostructures, including ferroelectrics, strongly correlated oxides, multiferroics, superconductors, thermoelectrics, photovoltaics, oxide catalysts, and electronic/ionic conductors, as well as on the characterization of their functional properties.


MIP Configuration:

  • Two Radial Distribution Chambers for flag-style sample plates, load lock chamber
  • Connection line between the RDCs with connection port for a UHV suitcase
  • EVO 50 MBE system for flag-style sample plates
  • ARPES Lab with 3D Ferrum spin detector
  • Preparation chamber for LEED, sputter cleaning and mask handling

System Video:

Link to Institute:

https://web.ornl.gov/~hnlee/Home.html

https://www.ornl.gov/division/mstd/thin-films-and-nanostructure

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NTT Group Japan – Quantum Solid State Physics Research

Research Focus:

  • Topologically protected quantum effects in solid state
  • Electron correlations and quantum coherence in semiconductor nanostructures
  • Many-body effects in quantum Hall systems
  • Interplay between disorder and interaction
  • Design/growth/fabrication of two-dimensional electron systems with controlled physical properties


MIP Configuration:

  • Magnetically coupled, manually actuated linear transfer line with 2 segments each 3 m lengths, including load-lock chamber, wafer heater chamber and mask handling chamber
  • Trolley for up to six 2" wafer carrier rings
  • Two EVO 50 MBE modules for topological compounds and III-V semiconductors
  • One Lab 10 MBE module for metals, customized for 2" wafer carrier rings


Link to institute:

http://www.brl.ntt.co.jp/group/butsuryo-g/index.html

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Penn State University- 2D Crystal Consortium (2DCC-MIP)

Research Focus: Fundamental behavior of spin in quantum materials, with a view toward discovering emergent phenomena and developing spintronic technologies for processing, storing and transporting quantum information.

  • 2D transition metal dichalcogenide (TMD) films that are only a few atoms thick
  • Topological insulator (TI) bismuth chalcogenide films that only conduct on the 2D surface
  • Multilayers of dissimilar chalcogenide films with properties dominated by 2D interfaces

MIP Configuration:

  • Radial distribution chamber with load-lock chamber
  • EVO 50 MBE module for TMDCs
  • ARPES module
  • LT Nanoprobe with UHV SEM

Link to institute:

http://sites.psu.edu/samarthgroup/

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Tsinghua University - Key Laboratory of Advanced Materials

Research Focus on Spintronics

  • Functional antiferromagnets,
  • Electrical control of ferromagnetism,
  • Spin Hall effect, and
  • Spin injection devices


MIP Configuration:

  • Magnetically coupled, motorized linear transfer line with 3 segments each 3 m length, including a load lock chamber
  • Trolley for up to six 2" wafer carrier rings
  • Combined NanoSAM/VT-STM module with preparation chamber
  • ARPES module with wafer heater chamber
  • 2 MBE Modules


Integration of 3rd party modules

  • Handover chamber for ALD module
  • Sputter module
  • PLD module

Link to institute:

http://www.mse.tsinghua.edu.cn/en/essay/82/431.html

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HNF Jülich - Nanofabrication & Epitaxy Cluster

Technology platform of the Helmholtz foundation for:

  • Structures and devices for Quantum Computing
  • Semiconductor technology
  • Materials and concepts for novel devices


14 module UHV cluster system for up to 4" wafers

  • 4 PRO 100 MBE
  • 3 Sputter modules
  • Interface to 3rd party ALD
  • 2 wafer introduction and preparation modules
  • 2 radial distribution chambers and 2 linear transfer lines
  • Wafer tracking


Link to institute:

http://www.fz-juelich.de/hnf/EN/Home/home_node.html

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University of Waterloo - Institute for Quantum Computing (ICQ)

Research focus:
Enabling the combination of different material classes for the development of novel quantum materials.

MIP Configuration:

  • Linear transfer line
  • 5 deposition modules
  • Oxide, metal and topological insulator MBE
  • Superconductor and magnetic material sputtering
  • Analysis module for XPS, UPS, AES, ISS
  • Load-lock, wafer heating and plasma cleaning, mask handling
  • UHV suitcase for sample exchange with ALD and LT-SPM
  • True UHV 2" wafer handling


Link to institute:

http://miao.iqc.uwaterloo.ca/

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Polish Center for Technology Development - Epitaxy Laboratory

Research focus on fabrication of epitaxially grown III-N semiconductors for optoelectronics and spintronics using a state-of-the-art cleanroom lab.


MIP Configuration:

  • 4" wafer cluster system with radial distribution chamber
  • 2 PRO 100 III-N MBE modules for optoelectronics and semi-magnetics
  • Analysis module for XPS, UPS, AES & Large Sample SPM on 4" wafers


Link to institute:

https://www.port.org.pl/en/laboratorium/epitaxy-laboratory/

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IWF Dresden - Institute for Integrative Nanosciences (IIN)

IIN research activities cover:

  • Flexible & printable magneto-electronic devices, self-propelled nanotools, strain-tunable single photon devices, ultra-compact self-wound batteries
  • Binary GaAs, AlAs, InAs layers
  • Ternary InGaAs & AlGaAs compounds
  • Self-assembled InAs & GaAs quantum dots


MIP Configuration:

  • Linear transfer line
  • 4" PRO 100 III-V molecular beam epitaxy system
  • Integration of existing Scienta Omicron analysis module (SPM, LEED) and 3rd party Si/Ge MBE module
  • Argon-filled glove box for preparation in inert gas (etching, resist stripping, etc.)


Link to institute:

https://www.ifw-dresden.de/ifw-institutes/iin/

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University of Texas, Department of Materials Science and Engineering

Research focus on nanoscale materials, interfaces and advanced devices:

  • High-k gate dielectrics
  • Gate electrodes
  • Novel 2D materials (TMDs, e.g. MoS2)

MIP configuration:

  • Linear transfer line for 4" wafer carrier rings
  • SiGe MBE and metal MBE modules
  • Sputter Module
  • Heater chamber for thermal annealing
  • Interfacing to 3rd party ALD module
  • Surface analysis module for XPS, UPS & Large Sample SPM on 4" wafers


Link to institute:

https://sites.google.com/site/robertmwallace01/

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