The turnkey ESCA solution

At a Glance

  • High throughput elemental analysis with ultimate sensitivity
  • Rapid snap shot automated measurements
  • State of the art 128 channel detector
  • Flexible configurations for GCIB, UPS, ISS, etc.
  • Interface to other modules, MBE, SPM, etc.

Turnkey ESCA solution

ESCA 2SR is a versatile XPS instrument allowing for surface characterization by routine and advanced XPS and ESCA applications.

It is a convenient to use turnkey system which combines high sensitivity, excellent energy resolution and high sample throughput with an advanced sample stage concept optimized for routine and advanced scientific experiments. The stage handles multiple thin and thick samples and can be easily customized for individual needs of a specific experiment including options for heating and cooling.

The ESCA 2SR system includes a state of the art 128 channels detector, a dedicated 500 mm Rowland circle high power monochromatic x-ray source and efficient charge neutralization. A monoatomic ion sputter source is included in the base configuration.

The configuration of the ESCA 2SR can be easily expanded for a cluster ion source, a dual beam x-ray source, a UV source and various preparation facilities.


Vacuum System

The ESCA 2SR System includes a convenient to use, turnkey UHV system consisting of a mu-metal analysis chamber and an easy access fast entry load lock (FEL). A fast pump down sequence provides for short sample transfer times. Optional in-situ sample storage for multiple samples can be provided.

The system has interfaces for connecting a preparation chamber or a vacuum transport. Other options include connection to a glove box or custom UHV facilities to allow for multi-technique extensions (e.g. SPM or MBE). Furthermore, the analysis chamber includes additional ports for upgrade options such as a UV excitation source for UPS, a cluster ion source for depth profiling of sensitive materials etc.

The ESCA 2SR System is equipped with Mistral – a built- in PLC system control center with 12" touch screen and PC access.


Manipulator and stage controller

The ESCA 2SR operates using a large sample platen carrier. The carrier allows for mounting multiple samples and offers great flexibility for size and shape of sample specimen. Additionally the instrument can be operated using a dedicated sample platen for rotation during depth profiling. A large verity of other stage options allows for tailoring to the stage to the individual needs.