FZ Juelich Cluster

Installed at the HNF (Helmholtz Nanofabrication Facility) Juelich, Germany

At a Glance

4“ multi-module cluster tool installed at the HNF (Helmholtz Nanofabrication Facility) in the FZ Juelich (Forschungszentrum Jülich, Germany). It consists of several MBE (Metal, III-V) and UHV sputter deposition chambers interconnected by a combination of linear transfer lines and central distribution chambers equipped with a telescopic transfer arm. Vacuum connection is also realized to an ALD deposition tool (FlexAL) via a buffer/sample-flip chamber.