FDG 150

At a Glance

•    10 eV to 5 keV operation
•    Integral mechanical aligner
•    Excellent target current characteristics
•    High current density


FDG 150 is a differentially pumped floating column ion gun, which is designed for high performance sputter depth profiling and sample neutralization applications, see also CN 10.

The digitally controlled fine focus ion gun provides an adjustable beam size with highest current densities and a raster mode for homogeneous sample etching.

Digital power supply is fully software controlled and can also be operated standalone. It includes on board digital scan & deflection processor with a user-adjustable keystone correction algorithm.

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