• H₂ dissociation typically 80-98% depending on operation conditions
• Atomic hydrogen flux density up to 1*10E¹⁶/(cm²s)
• No high-energy particles and ions

The Hydrogen Atom Beam Source HABS is a thermal gas cracker which produces an ion-free hydrogen gas beam to avoid ion induced damage of the substrate. In comparison to hydrogen sources based on electron bombardment heating the HABS is heated by a DC operated tungsten filament. It is suitable for large samples.