Radial Distribution Chamber (RDC)
Super-Flexible Transfer Backbone for UHV Clusters
- Safe and easy sample handling
- Suitable for flag-style sample holders or wafers up to 4" diameter
- Individually designed UHV chamber for best use of lab space
- Easily configurable regarding pumps and motorisation
- Fully integrated into MISTRAL system control
The Radial Distribution Chamber (RDC) is based on a continuously rotatable telescopic transfer arm that can be equipped with a variety of end effectors for flag-style sample holders or wafer carrier rings for up to 4” wafers. The port configuration of the RDC can be adjusted to arrange the connected modules such that the available lab space is used in an optimal way.
With the optional motorisation package, the need for manual action by the user can be kept to a minimum. The motors are integrated into the MISTRAL system control, which makes the RDC a convenient and robust sample transfer solution.
Since magnetic transfer arms are not needed any more, there are fewer constraints on the arrangement of the connected system modules. This helps to make optimal use of the precious lab space. Compact appendix chambers are available for special purposes such as sample heating and degassing, cleaving, storage or catalysis experiments.
The RDC gives maximum flexibility in the system design due to its compatibility with the Linear Transfer Line, a glove box, UHV suitcase or a connection to 3rd party modules. Since it is possible to add further RDCs at a later stage, possibly including a relocation of existing modules to make space for new modules, the initial investment is sustainable for the long term.
Nanofabrication & Epitaxy Cluster
The Nanofabrication and Epitaxy Cluster is a multi-user platform of the Helmholtz Foundation for research on structures and devices for quantum computing, semiconductor technology and materials, and concepts for novel devices. Extended in 2020 by a NanoScanLab (FIB/SEM), Large Sample SPM for 4" wafers, and LEED module.more
Materials Innovation Platform (MIP) with research focus on fabrication of epitaxially grown III-N semiconductors for optoelectronics and spintronics using a state-of-the-art cleanroom lab.more
Materials Innovation Platform (MIP) with EVO-50 MBE, ARPES and LT Nanoprobe
The 2DCC-MIP is focused on advancing the synthesis of 2D materials within the context of a national user facility. The 2DCC is developing custom deposition tools with in-situ and real time characterisation and facilities for bulk growth of chalcogenide single crystals. Unique capabilities are also available to simulate growth kinetics through first principles and a reactive potential approach.more
Materials Innovation Platform (MIP) with MBE, ALD, and XPS
The group’s multidisciplinary research focuses on the growth, characterisation, and device physics of quantum and semiconductor materials for novel devices and applications. Their approach utilises advanced molecular beam epitaxy techniques, selective area atomic layer deposition, and highly developed materials characterisation to fundamentally understand the nucleation and growth process, material nanostructure, chemical bonding, and experimentally determined band structure. They then correlate those findings with advanced electrical transport and magnetic measurements from devices that they fabricate to take full advantage of the novel properties of the materials and heterostructures that are created. Their current research interests include semiconductor defects for quantum communication, topologically protected transport in semiconductors and metals, magnetic properties in 2D materials, and back-end-of-line materials and device integration.more
Materials Innovation Platform (MIP) for Epitaxial Quantum Materials
Research focus on controlled synthesis of epitaxial thin films and nanostructures, including: ferroelectrics, strongly correlated oxides, multiferroics, superconductors, thermoelectrics, photovoltaics, oxide catalysts, electronic/ionic conductors, and the characterisation of their functional properties.more
Cluster Tool for MBE and ARPES
Materials Innovation Platform (MIP) with ARPES and MBE modules for the growth and characterisation of topological insulator chalcogenide crystals.more
NanoScan Lab with FIB/SEM and Large Sample SPM
Extension to the large 14 modules HNF cluster by a NanoScan Lab for SEM/FIB and an SPM module. Both modules are interfaced to the existing cluster and work on 4" samples.more