Nanofabrication & Epitaxy Cluster

Forschungszentrum Jülich - Helmholtz Nano Facility (HNF)

LEED SEM FIB PVD MBE ALD Sputter Deposition SPM STM

Reference Number: 121403

The Nanofabrication and Epitaxy Cluster is a multi-user platform of the Helmholtz Foundation for research on structures and devices for quantum computing, semiconductor technology and materials, and concepts for novel devices. Extended in 2020 by a NanoScanLab (FIB/SEM), Large Sample SPM for 4" wafers, and LEED module.

  • 14 Module UHV Cluster System for up to 4" Wafers
  • Four PRO 100 MBE Modules
  • Three Sputter Modules
  • Interface to 3rd Party ALD
  • 2 Wafer Introduction and Preparation Modules
  • 2 Radial Distribution Chambers and 2 Linear Transfer Lines
  • Wafer Tracking
     
  • NanoScanLab (FIB/SEM)
  • Large Sample SPM for 4" wafers
  • LEED module

Integrated Instruments