The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).
Horizontally mounted UHV electron beam evaporator on a DN150CF/ DN200CF/DN250CF (8"/10”/12” OD) mounting flange with 40 cc or 100 cc hearth volume.
- Fully UHV compatible construction
- DN150CF/ DN200CF/DN250CF (8"/10”/12” OD) mounting flange
- Hearth volumes 40 cm3 or 100 cm3
- Effective water cooling of the hearth
- Long filament lifetime
- Easy maintenance
- 270° beam deflection
- Standard 3 kW or 5 kW power (up to 10kW possible)
- Acceleration voltage from 4 to 10 kV
- High frequency x-y-beam deflection system
- Silicon shielding parts for use in SiGe-MBE