An EBV40-100 E-Beam Evaporator | © Scienta Omicron
EBV40/100.

EBV40/100

High Purity E-Beam Evaporator

PVDEBPVD

  • 270° beam deflection
  • Up to 10kW power
  • Large hearth capacity (up to 100cc)
  • High frequency x-y-beam deflection system

The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).

Horizontally mounted UHV electron beam evaporator on a DN150CF/ DN200CF/DN250CF (8"/10”/12” OD) mounting flange with 40 cc or 100 cc hearth volume.

  • Fully UHV compatible construction
  • DN150CF/ DN200CF/DN250CF (8"/10”/12” OD) mounting flange
  • Hearth volumes 40 cm3 or 100 cm3
  • Effective water cooling of the hearth 
  • Long filament lifetime 
  • Easy maintenance 
  • 270° beam deflection 
  • Standard 3 kW or 5 kW power (up to 10kW possible)
  • Acceleration voltage from 4 to 10 kV
  • High frequency x-y-beam deflection system 
  • Silicon shielding parts for use in SiGe-MBE