A specially designed UHV system and dedicated damping technologies are fundamental requirements for optimal performance of all measurement techniques.
An extremely rigid frame carries the thick-walled main chamber and is vibration-isolated by a pneumatic auto-levelling damping system. In addition, the UHV NANOPROBE stage is efficiently de-coupled by a VITON stack damping system ensuring both STM performance and a rigid mechanical loop to the high-resolution UHV Gemini column.
The standard configuration 'UHV NANOPROBE S' is a stand-alone single-chamber system equipped with a fast entry load lock and two storage carousels for probe tips and samples.
The system concept is modular and the standard 'S' system can be extended or even upgraded later to a dual-chamber system 'UHV NANOPROBE XP'. This extension allows for separate sample preparation by sputtering, annealing, and thin film deposition or integration of additional analysis techniques.
Download as PDF