SPM Probe

Compact and cost-effective integration of VT SPM's

At a Glance

The SPM Probe is a compact and cost-effective complete UHV system solution for OMICRON’s UHV VT SPMs. The rigid bench is ideally suited for high resolution SPM work. The UHV SPM is directly mounted to the experimental chamber. The chamber has all essential features for sample loading and preparation. The experimental chamber can be easily equipped with auxiliary techniques for sample preparation and characterization. Further ports on the chamber are allocated for a LEED optic, evaporator, sputter ion source, residual gas analyzer (RGA), sample viewing, pressure measurement and vacuum pumps.

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