SPHERA

Hemispherical Analyser - XPS without Compromise

At a Glance

  • Excellent sensitivity
  • Imaging and small area XPS
  • ISS, AES, SAM, XPD and UPS
  • Channeltron or Argus technology 
  • CASCADE automation system 
  • Rapid upgrade of outdated XPS systems
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Analyzer Concept

SPHERA is a multi-purpose easy-to-use electron spectrometer with excellent transmission and sensitivity. Standard applications of the SPHERA are XPS and imaging XPS (optional), AES, UPS, SAM and ISS.

Rapid quantitative analysis relies on high sensitivity detectors and well characterized high-transmission electron optics in all parts of the spectrometer from the lens entrance to the detector surface. The SPHERA is based on proven lens design optimized by extensive electron optical simulations and careful verification in experiments.

Well defined small spot analysis is guaranteed by a dedicated and easy-to-use aperture mechanism. The combination of a double aperture mechanism and a fully characterized magnification lens ensures defined area analysis from several mm down to <60 µm diameter without crosstalk from the surrounding area.

While imaging XPS ensures navigation and identification of inhomogeneous samples the Argus technology increases analysis speed and provides modes e.g. for dynamic process analysis.

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