SPHERA is a multi-purpose easy-to-use electron spectrometer with excellent transmission and sensitivity. Standard applications of the SPHERA are XPS and imaging XPS (optional), AES, UPS, SAM and ISS.
Rapid quantitative analysis relies on high sensitivity detectors and well characterized high-transmission electron optics in all parts of the spectrometer from the lens entrance to the detector surface. The SPHERA is based on proven lens design optimized by extensive electron optical simulations and careful verification in experiments.
Well defined small spot analysis is guaranteed by a dedicated and easy-to-use aperture mechanism. The combination of a double aperture mechanism and a fully characterized magnification lens ensures defined area analysis from several mm down to <60 µm diameter without crosstalk from the surrounding area.
While imaging XPS ensures navigation and identification of inhomogeneous samples the Argus technology increases analysis speed and provides modes e.g. for dynamic process analysis.