SEM 250 / SEM 500

Electron Source for SEM and Auger

At a Glance

SEM 250: Electron source for SEM and Auger experiments with spot size better than 250 nm at 12 kV beam voltage/1 nA beam current, at 16 mm working distance. Featuring 0.2 - 12 keV beam energy, Tungsten-filament, maximum beam current 1 µA, the SEG 250 is a versatile, fully electrostatic focusing and deflection column, with variable beam current. Bakeable to 200 °C. Mounting flange NW 63 CF (4½" OD).

 

SEM 500: Electron source for SEM and Auger experiments with spot size better than 500 nm at 12 kV beam voltage/1 nA beam current, at 15 mm working distance. Featuring 0.2 - 12 keV beam energy, Tungsten-filament, maximum beam current 1 µA, the SEG 500 is a versatile, fully electrostatic focusing and deflection column, with variable beam current. Bakeable to 200 °C. Mounting flange NW 63 CF (4½" OD).

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