MS 5 Micro Piezo Slide

UHV Compatible, Linear Piezo Motor

At a Glance

The MS5  is a UHV compatible, linear piezo motor for application-specific integration by the user.

It's main technical features are 5 mm travel, tractive force 500 mN, step size continuously adjustable between 40 nm and 400 nm. Single step operation and continous movement up to 1 mm / s.

Dimensions 36 mm x 15 mm x 7 mm, threads and holes for mounting are provided. Four mounting screws and UHV compatible twisted pair wire (0.5 m long) with female connectors (for pin diam. 0.5 mm) at both ends are included. Two or three MS 5 can be mounted for xy- or xyz combinations.


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