DECO

Decomposition Sources

At a Glance

The Phosphorus Doping Source DECO is an ultra pure source for P2, based on the decomposition of GaP. At typical operation temperatures of about 600° C - 700° C, GaP is essentially decomposed into Ga and P2. Additional cracking is not necessary and the accumulation of P4 (white phosphorus) is reduced to a minimum.

  • Ultra high purity phosphorus (P2) source
  • Effusion cell-like operation
  • Fast and precise flux control
  • Safe and pure doping and growth techniques
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