The Phosphorus Doping Source DECO is an ultra pure source for P2, based on the decomposition of GaP. At typical operation temperatures of about 600° C - 700° C, GaP is essentially decomposed into Ga and P2. Additional cracking is not necessary and the accumulation of P4 (white phosphorus) is reduced to a minimum.
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- Ultra high purity phosphorus (P2) source
- Effusion cell-like operation
- Fast and precise flux control
- Safe and pure doping and growth techniques