R3000 XPS module (CH)

PES module interconnecting to a MULTIPROBE LT STM for structural analysis

At a Glance

The multi chamber system at EMPA Dübendorf, Switzerland, consists of one module for electron spectroscopy interconnected by a linear transfer line to a MULTIPROBE LT STM module.
The spectroscopy module features an R3000 XPS/UPS/ARPES analyser combined with an XM1000 monochromator and a 5-axis motorized liquid Helium cooled sample manipulator. The large preparation chamber allows LEED, sample sputter-cleaning and basic thin-film growth.