IQC Cluster Tool

Installed at the Institute for Quantum Computing at the University of Waterloo, Canada

At a Glance

The Institute for Quantum Computing at the University of Waterloo owns a large cluster system from Omicron with 5 deposition modules plus a nicely equipped analytical module and a preparation chamber. The motorized cable-driven linear transfer line allows fast and reliable wafer handling (2") under true UHV conditions. The chambers are designed for: Oxide MBE, Metal MBE, Topological Insulator MBE, Superconducting Material Sputtering, Magnetic Material Sputtering, Surface Analysis.

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