- H2 dissociation typically 80-98% depending on operation conditions
- Atomic hydrogen flux density up to 1*10E16/(cm2s)
- No high-energy particles and ions
The Hydrogen Atom Beam Source HABS is a thermal gas cracker which produces an ion-free hydrogen gas beam to avoid ion induced damage of the substrate. In comparison to hydrogen sources based on electron bombardment heating the HABS is heated by a DC operated tungsten filament. It is suitable for large samples.